Scanning probe/scanning electron microscopy:Omicron UHV Nanoprobe
(N. Guisinger, Electronic & Magnetic Materials & Devices Group)
Local, nondestructive four-point contact measurements and function testing of nanodevices within complex structures; accurate probe positioning and safe approach of fragile probe tips having diameters in the range of a few tens of nanometers or less.
Four independent STM probe tips with simultaneous SEM imaging enables a large field of view for coarse positioning as well as fine positioning of nanometer-sized structures with the SEM's high-resolution capabilities.
UHV Gemini column for chemical mapping by scanning auger microscopy and magnetic imaging by SEM with polarization analysis (SEMPA). This yields complementary information on sample conductance, topography, chemistry, and magnetism.